Tokyo Electron

Headquartered in Tokyo, Tokyo Electron Limited is a Japanese producer of production equipment for semiconductors and flat-panel displays. Its wafer-fab line-up takes in coater/developer tracks, plasma etch and wet-cleaning systems, CVD, ALD and thermal deposition tools, plus wafer probers and display-production equipment.

ZHIMAI is based in China and ships Tokyo Electron process equipment and spare parts to fabs internationally. We buy directly from manufacturers across China, Asia and farther out, then handle procurement, logistics and customs on each consignment.

Typical product lines we supply:

• Coater/Developer (CLEAN TRACK): photoresist coat-and-develop track systems for 200/300mm wafers, including the CLEAN TRACK LITHIUS Pro line for EUV and High-NA lithography.
• Plasma etch systems: single-wafer plasma etch tools such as Tactras and Episode UL, including cryogenic etch for high-aspect-ratio 3D NAND structures.
• Cleaning / surface preparation systems: single-wafer (CELLESTA) and batch wet-cleaning, pre-clean and scrubber stations that condition wafer surfaces between process steps.
• Deposition systems (CVD/ALD/thermal): film-deposition tools including the NT333 ALD system, CVD/sputtering systems and batch thermal-processing furnaces for 300mm wafers.
• Test systems (wafer/device probers): automated wafer and device probers such as Prexa SDP and Precio for electrical test of integrated circuits.
• FPD production equipment: flat-panel-display coater/developer and plasma etch/ash systems (Impressio, PICP) for Gen 6-10.5 display substrates.

Current catalogue equipment ships to order, and legacy or hard-to-find Tokyo Electron items are sourced subject to compliance screening.