Lam Research

Based in Fremont, California, Lam Research Corporation is an American maker of semiconductor-fabrication equipment and a major supplier to chipmakers. Its systems handle thin-film deposition, plasma etch, wafer cleaning and photoresist strip, backed by mass-metrology tools and process-control software used in logic and memory fabs.

Operating from China, ZHIMAI procures Lam Research systems and spare parts for chipmakers worldwide. Our access to manufacturers throughout China, Asia and further afield widens sourcing, and we see procurement, freight and customs through from order to delivery.

Typical product lines we supply:

• Etch systems (Kiyo, Flex, Sense.i, Vantex): Plasma etch platforms that selectively remove material to form nanoscale features, including conductor etch (Kiyo), high-aspect-ratio dielectric etch (Flex, Vantex) and the Sense.i high-density platform.
• Deposition systems (ALTUS, VECTOR, SABRE, Striker): Thin-film deposition tools using ALD, PECVD, electroplating and dielectric CVD to build metal and dielectric layers: ALTUS tungsten ALD, VECTOR PECVD and SABRE electrofill.
• Strip and clean (Coronus, Da Vinci, EOS, SP series): Photoresist strip and wafer-cleaning systems, including Coronus bevel-clean products and wet spin-clean platforms that remove residues and defects to improve yield.
• Mass metrology (Metryx): High-precision wafer mass-measurement and process-monitoring systems used to control critical deposition and etch steps in high-volume fabs.
• Equipment intelligence and software (Semiverse Solutions): Process-control software, virtual-fabrication and equipment-intelligence tools that simulate and optimize semiconductor manufacturing processes.
• Customer support systems (Reliant): Refurbished and reconditioned legacy etch, deposition and clean systems, plus spares and upgrades for installed fab equipment.

Both current systems and legacy or hard-to-find Lam Research equipment can be ordered, the latter sourced subject to compliance screening.